Floating-type substrate transfer device
The substrate is set on a porous PE plate! There is no need to flip the substrate even for double-sided inspection.
We would like to introduce our "Floating Type Substrate Transport Device." The material used is ultra-high molecular weight polyethylene (UHMW-PE), with an average pore diameter ranging from Min 2μm to Max 80μm, and a porosity of 35% to 40%. Additionally, it employs a static electricity prevention method that leaks static electricity to the outside through conductive pathways formed in the air holes, with a heat resistance temperature of up to 90°C for continuous use. 【Specifications (Partial)】 ■ Material: Ultra-high molecular weight polyethylene (UHMW-PE) ■ Average pore diameter: Min 2μm to Max 80μm ■ Porosity: 35% to 40% ■ Flatness: 10μm ■ Static electricity prevention method: Leaks static electricity to the outside through conductive pathways formed in the air holes *For more details, please refer to the PDF document or feel free to contact us.
- Company：ポーラス・コーポレーション 開発室
- Price：Other
